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Group by: No Grouping | Item Type | Date
Number of items: 5.

Greiner, Felix (2013)
Mikro-Nano-Integration für metallische Mikrosysteme mit vertikal integrierten Federelementen.
Technische Universität Darmstadt
Ph.D. Thesis, Primary publication

Greiner, Felix ; Schlaak, Helmut F. (2013)
Cleanroom Laboratory for Micro- and Nanotechnology.
4th International Target Fabrication Workshop. Mainz (19.08. - 23.08.2012)
Conference or Workshop Item, Secondary publication

Greiner, Felix ; Schlaak, Helmut F. (2013)
Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors.
4th ANKA/KNMF Users' Meeting. Karlsruhe (10.-11.10.2012)
Conference or Workshop Item, Secondary publication

Greiner, Felix ; Schlaak, Helmut F. (2012)
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
International Target Fabrication Workshop, 2012.
Conference or Workshop Item, Primary publication

Quednau, Sebastian ; Greiner, Felix ; Schlaak, Helmut F. ; Rauber, Markus ; Ensinger, Wolfgang ; Neumann, Reinhard (2010)
Integration von Nanodrahtarrays in Mikrosysteme für die Gasflusssensorik.
In: GMM Fachbericht 63 "Mikro-Nano-Integration", 2010
Book Section, Secondary publication

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