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Number of items: 5.

Greiner, Felix (2013):
Mikro-Nano-Integration für metallische Mikrosysteme mit vertikal integrierten Federelementen.
In: Institut für Elektromechanische Konstruktionen, 30, Darmstadt, Technische Universität, [Ph.D. Thesis]

Greiner, Felix and Schlaak, Helmut F. (2012):
Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors.
In: Abstract Book 4th ANKA/KNMF Users' Meeting, Karlsruhe, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, In: 4th International Target Fabrication Workshop, Mainz, p. 100, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, In: International Target Fabrication Workshop, 2012, p. 69, [Conference or Workshop Item]

Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Rauber, Markus and Ensinger, Wolfgang and Neumann, Reinhard (2010):
Integration von Nanodrahtarrays in Mikrosysteme für die Gasflusssensorik.
In: GMM Fachbericht 63 "Mikro-Nano-Integration", (63), VDE VERLAG GMBH, pp. 159-164, ISSN 1432-3419, [Article]

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