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Number of items: 5.

Greiner, Felix :
Mikro-Nano-Integration für metallische Mikrosysteme mit vertikal integrierten Federelementen.
Technische Universität Darmstadt, Darmstadt
[Ph.D. Thesis], (2013)

Greiner, Felix and Schlaak, Helmut F. :
Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors.
Abstract Book 4th ANKA/KNMF Users' Meeting Karlsruhe
[Conference or Workshop Item], (2012)

Greiner, Felix and Schlaak, Helmut F. :
Cleanroom Laboratory for Micro- and Nanotechnology.
[Online-Edition]
In: 4th International Target Fabrication Workshop, Mainz. Book of Abstracts on 4th International Target Fabrication Workshop Mainz
[Conference or Workshop Item], (2012)

Greiner, Felix and Schlaak, Helmut F. :
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
[Online-Edition]
In: International Target Fabrication Workshop, 2012. Book of Abstracts on 4th International Target Fabrication Workshop Mainz
[Conference or Workshop Item], (2012)

Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Rauber, Markus and Ensinger, Wolfgang and Neumann, Reinhard :
Integration von Nanodrahtarrays in Mikrosysteme für die Gasflusssensorik.
[Online-Edition]
In: GMM Fachbericht 63 "Mikro-Nano-Integration" (63) pp. 159-164. ISSN 1432-3419
[Article], (2010)

This list was generated on Fri Nov 28 14:31:14 2014 CET.