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An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate

Rein, M. H. ; Hohmann, M. V. ; Thøgersen, Annett ; Mayandi, Jeyanthinath ; Holt, Arve O. ; Klein, Andreas ; Monakhov, Eduard V. (2021)
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate.
In: Applied Physics Letters, 102 (2)
doi: 10.26083/tuprints-00019830
Article, Secondary publication, Publisher's Version

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Item Type: Article
Type of entry: Secondary publication
Title: An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate
Language: English
Date: 2021
Place of Publication: Darmstadt
Publisher: AIP Publishing
Journal or Publication Title: Applied Physics Letters
Volume of the journal: 102
Issue Number: 2
Collation: 4 Seiten
DOI: 10.26083/tuprints-00019830
Corresponding Links:
Origin: Secondary publication service
Abstract:

The interface between indium tin oxide and p-type silicon is studied by in situ X-ray photoelectron spectroscopy (XPS). This is done by performing XPS without breaking vacuum after deposition of ultrathin layers in sequences. Elemental tin and indium are shown to be present at the interface, both after 2 and 10 s of deposition. In addition, the silicon oxide layer at the interface is shown to be composed of mainly silicon suboxides rather than silicon dioxide.

Status: Publisher's Version
URN: urn:nbn:de:tuda-tuprints-198304
Classification DDC: 500 Science and mathematics > 530 Physics
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 05 Nov 2021 13:11
Last Modified: 16 Jan 2023 06:49
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19830
PPN: 503642320
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