Rein, M. H. ; Hohmann, M. V. ; Thøgersen, Annett ; Mayandi, Jeyanthinath ; Holt, Arve O. ; Klein, Andreas ; Monakhov, Eduard V. (2021)
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate.
In: Applied Physics Letters, 2013, 102 (2)
doi: 10.26083/tuprints-00019830
Article, Secondary publication, Publisher's Version