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An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate

Rein, M. H. ; Hohmann, M. V. ; Thøgersen, Annett ; Mayandi, Jeyanthinath ; Holt, Arve O. ; Klein, Andreas ; Monakhov, Eduard V. (2021):
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate. (Publisher's Version)
In: Applied Physics Letters, 102 (2), AIP Publishing, ISSN 0003-6951, e-ISSN 1077-3118,
DOI: 10.26083/tuprints-00019830,
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Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate
Language: English
Abstract:

The interface between indium tin oxide and p-type silicon is studied by in situ X-ray photoelectron spectroscopy (XPS). This is done by performing XPS without breaking vacuum after deposition of ultrathin layers in sequences. Elemental tin and indium are shown to be present at the interface, both after 2 and 10 s of deposition. In addition, the silicon oxide layer at the interface is shown to be composed of mainly silicon suboxides rather than silicon dioxide.

Journal or Publication Title: Applied Physics Letters
Journal volume: 102
Number: 2
Publisher: AIP Publishing
Collation: 4 Seiten
Classification DDC: 500 Naturwissenschaften und Mathematik > 530 Physik
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 05 Nov 2021 13:11
Last Modified: 05 Nov 2021 13:12
DOI: 10.26083/tuprints-00019830
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-198304
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19830
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