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Number of items: 2.
Article
Merbeler, Fabian ; Wismath, Sonja ; Haubold, Marco ; Bretthauer, Christian ; Kupnik, Mario (2022)
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates.
In: Micromachines, 2022, 13 (5)
doi: 10.26083/tuprints-00021291
Article, Secondary publication, Publisher's Version
Ph.D. Thesis
Merbeler, Fabian (2024)
Ultra-Low-Voltage CMUTs and Innovative Acoustic Coupling for Touch and Fill Level Sensing.
Technische Universität Darmstadt
doi: 10.26083/tuprints-00027634
Ph.D. Thesis, Primary publication, Publisher's Version
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