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Merbeler, Fabian ; Wismath, Sonja ; Haubold, Marco ; Bretthauer, Christian ; Kupnik, Mario (2022)
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates.
In: Micromachines, 2022, 13 (5)
doi: 10.26083/tuprints-00021291
Article, Secondary publication, Publisher's Version

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