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Cleanroom Laboratory for Micro- and Nanotechnology

Greiner, Felix ; Schlaak, Helmut F. (2013)
Cleanroom Laboratory for Micro- and Nanotechnology.
4th International Target Fabrication Workshop. Mainz (19.08. - 23.08.2012)
Conference or Workshop Item, Secondary publication

Copyright Information: CC BY-NC-ND 2.5 Generic - Creative Commons, Attribution, NonCommercial, NoDerivs .

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Item Type: Conference or Workshop Item
Type of entry: Secondary publication
Title: Cleanroom Laboratory for Micro- and Nanotechnology
Language: English
Date: 6 February 2013
Place of Publication: Darmstadt
Year of primary publication: 2012
Book Title: Book of Abstracts on 4th International Target Fabrication Workshop
Event Title: 4th International Target Fabrication Workshop
Event Location: Mainz
Event Dates: 19.08. - 23.08.2012

This poster aims to show the possibilities of a small scale research lab that focusses on surface micromachining processes without CMOS compatibility. Its size of 100 m^2 cleanroom keeps the flexibility to easily introduce exceptional materials but nevertheless offers a set of standard procedures for UV lithography and UV depth lithography, wet etching, electroplating, PVD, dry etching, packaging and characterization, respectively. The installations are optimized for 100 mm wafers and low temperature (< 150°C) surface micromachining, see figure.

The technology foci are Direct LIGA and long term stable ultra thick (200 µm .. 1.2 mm) functional materials based on epoxy resins. The combination of UV Direct LIGA (lithography, subsequent automatically driven electroplating and final release of metal structures from polymer molds) and nanotechnology offer potential for new MEMS and NEMS.

The nanotechnology aspect is introduced by the wafer level integration of ion track etched polymer membranes, e.g. made by GSI material research. The membranes act as molds for electroplating while UV lithography shapes the outer dimensions of the nanowire arrays.

Substrate materials currently comprise Silicon, glasses, ceramics and printed circuit board glass fibre reinforced plastic (FR4). Structures are made of Ni, Cu, Au, Cr, Al, epoxy resins like different SU-8 formulations, polycarbonate and combinations of those.

Figure: Part of the cleanroom laboratory installations, for details see http://www.emk.tu-darmstadt.de/en/institute/equipment/

URN: urn:nbn:de:tuda-tuprints-31222
Classification DDC: 500 Science and mathematics > 530 Physics
600 Technology, medicine, applied sciences > 620 Engineering and machine engineering
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 06 Feb 2013 09:26
Last Modified: 25 Apr 2024 07:50
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/3122
PPN: 386275106
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