TU Darmstadt / ULB / TUprints

Cleanroom Laboratory for Micro- and Nanotechnology

Greiner, Felix ; Schlaak, Helmut F. (2012)
Cleanroom Laboratory for Micro- and Nanotechnology.
4th International Target Fabrication Workshop. Mainz
Conference or Workshop Item, Primary publication

Copyright Information: CC BY-NC-ND 2.5 Generic - Creative Commons, Attribution, NonCommercial, NoDerivs .

Download (2MB) | Preview
Item Type: Conference or Workshop Item
Type of entry: Primary publication
Title: Cleanroom Laboratory for Micro- and Nanotechnology
Language: English
Date: 19 August 2012
Place of Publication: Mainz
Book Title: Book of Abstracts on 4th International Target Fabrication Workshop
Event Title: 4th International Target Fabrication Workshop
Event Location: Mainz
Corresponding Links:

This poster aims to show the possibilities of a small scale research lab that focusses on surface micromachining processes without CMOS compatibility. Its size of 100 m^2 cleanroom keeps the flexibility to easily introduce exceptional materials but nevertheless offers a set of standard procedures for UV lithography and UV depth lithography, wet etching, electroplating, PVD, dry etching, packaging and characterization, respectively. The installations are optimized for 100 mm wafers and low temperature (< 150°C) surface micromachining, see figure.

The technology foci are Direct LIGA and long term stable ultra thick (200 µm .. 1.2 mm) functional materials based on epoxy resins. The combination of UV Direct LIGA (lithography, subsequent automatically driven electroplating and final release of metal structures from polymer molds) and nanotechnology offer potential for new MEMS and NEMS.

The nanotechnology aspect is introduced by the wafer level integration of ion track etched polymer membranes, e.g. made by GSI material research. The membranes act as molds for electroplating while UV lithography shapes the outer dimensions of the nanowire arrays.

Substrate materials currently comprise Silicon, glasses, ceramics and printed circuit board glass fibre reinforced plastic (FR4). Structures are made of Ni, Cu, Au, Cr, Al, epoxy resins like different SU-8 formulations, polycarbonate and combinations of those.

Figure: Part of the cleanroom laboratory installations, for details see http://www.emk.tu-darmstadt.de/en/institute/equipment/

URN: urn:nbn:de:tuda-tuprints-31222
Classification DDC: 500 Naturwissenschaften und Mathematik > 530 Physik
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 06 Feb 2013 09:26
Last Modified: 09 Jul 2020 00:12
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/3122
Actions (login required)
View Item View Item