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Sobel, Nicolas ; Hess, Christian ; Lukas, Manuela ; Spende, Anne ; Stühn, Bernd ; Toimil-Molares, M. E. ; Trautmann, Christina (2024)
Conformal SiO₂ coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition.
In: Beilstein Journal of Nanotechnology, 2015, 6
doi: 10.26083/tuprints-00026767
Article, Secondary publication, Publisher's Version
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