Article

Ruff, Philip ; Carrillo-Solano, Mercedes ; Ulrich, Nils ; Hadley, Andrea ; Kluth, Patrick ; Toimil-Molares, Maria Eugenia ; Trautmann, Christina ; Hess, Christian (2024)
Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation.
In: Zeitschrift für Physikalische Chemie, 2018, 232 (7-8)
doi: 10.26083/tuprints-00026936
Article, Secondary publication, Publisher's Version