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Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy

Heine, Carl ; Durmaz, Emre Can ; Wang, Defu ; Cao, Zhibo ; Wietstruck, Matthias ; Tillack, Bernd ; Kissinger, Dietmar (2023):
Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy. (Publisher's Version)
In: Frequenz, 76 (11-12), pp. 685-697. De Gruyter, ISSN 0016-1136,
DOI: 10.26083/tuprints-00023214,
[Article]

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Item Type: Article
Origin: Secondary publication
Status: Publisher's Version
Title: Towards a fully integrated sub-THz microfluidic sensor platform for dielectric spectroscopy
Language: English
Abstract:

Dielectric spectroscopy in the sub-THz regime is a promising candidate for microfluidic-based analysis of biological cells and bio-molecules, since multiple vibrational and rotational transition energy levels exist in this frequency range (P. Siegel, “Terahertz technology in biology and medicine,” IEEE Trans. Microw. Theor. Tech., vol. 52, pp. 2438–2447, 2004). This article presents our recent efforts in the implementation of microfluidic channel networks with silicon-based technologies to unleash the potential of an integrated sub-THz microfluidic sensor platform. Various aspects of dielectric sensors, readout systems, flowmeter design as well as implemention- and technology-related questions are addressed. Three dielectric sensor systems are presented operating at 240 GHz realizing transmission-based, reflection-based and full two-port architectures. Furthermore different silicon based microchannel integration techniques are discussed as well as a novel copper pillar-based PCB microchannel method is proposed and successfully demonstrated.

Journal or Publication Title: Frequenz
Volume of the journal: 76
Issue Number: 11-12
Place of Publication: Darmstadt
Publisher: De Gruyter
Uncontrolled Keywords: BiCMOS, dielectric spectroscopy, microfluidic, sensor platform, SiGe, subterahertz (sub-THz)
Classification DDC: 500 Naturwissenschaften und Mathematik > 530 Physik
500 Naturwissenschaften und Mathematik > 570 Biowissenschaften, Biologie
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP)
Date Deposited: 01 Mar 2023 10:02
Last Modified: 01 Mar 2023 10:13
DOI: 10.26083/tuprints-00023214
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-232140
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/23214
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