TU Darmstadt / ULB / TUprints

Visualizing nanometric structures with sub-millimeter waves

Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar ; Méndez Aller, Mario ; Preu, Sascha (2022)
Visualizing nanometric structures with sub-millimeter waves.
In: Nature Communications, 2021, 12 (1)
doi: 10.26083/tuprints-00020430
Article, Secondary publication, Publisher's Version

[img] Text
Copyright Information: CC BY 4.0 International - Creative Commons, Attribution.

Download (1MB)
[img] Text
Copyright Information: CC BY 4.0 International - Creative Commons, Attribution.

Download (1MB)
Item Type: Article
Type of entry: Secondary publication
Title: Visualizing nanometric structures with sub-millimeter waves
Language: English
Date: 2 February 2022
Place of Publication: Darmstadt
Year of primary publication: 2021
Publisher: Nature Publishing Group UK
Journal or Publication Title: Nature Communications
Volume of the journal: 12
Issue Number: 1
Collation: 7 Seiten
DOI: 10.26083/tuprints-00020430
Corresponding Links:
Origin: Secondary publication service

The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375mm and 0.5mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surfacestructured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.

Status: Publisher's Version
URN: urn:nbn:de:tuda-tuprints-204300
Additional Information:

The raw data supporting this study have been deposited in the “TUdatalib” database and are available at https://doi.org/10.48328/tudatalib-664.

All codes written for and used in this study are available from the corresponding authors upon request.

Classification DDC: 600 Technology, medicine, applied sciences > 620 Engineering and machine engineering
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP)
Date Deposited: 02 Feb 2022 13:41
Last Modified: 14 Nov 2023 19:04
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/20430
PPN: 50618823X
Actions (login required)
View Item View Item