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Visualizing nanometric structures with sub-millimeter waves

Ingar Romero, Alonso ; Mukherjee, Amlan kusum ; Fernandez Olvera, Anuar ; Méndez Aller, Mario ; Preu, Sascha (2022):
Visualizing nanometric structures with sub-millimeter waves. (Publisher's Version)
In: Nature Communications, 12 (1), Nature Publishing Group UK, ISSN 2041-1723,
DOI: 10.26083/tuprints-00020430,

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Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: Visualizing nanometric structures with sub-millimeter waves
Language: English

The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375mm and 0.5mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surfacestructured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.

Journal or Publication Title: Nature Communications
Volume of the journal: 12
Issue Number: 1
Publisher: Nature Publishing Group UK
Collation: 7 Seiten
Classification DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP)
Date Deposited: 02 Feb 2022 13:41
Last Modified: 02 Feb 2022 13:41
DOI: 10.26083/tuprints-00020430
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-204300
Additional Information:

The raw data supporting this study have been deposited in the “TUdatalib” database and are available at https://doi.org/10.48328/tudatalib-664.

All codes written for and used in this study are available from the corresponding authors upon request.

URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/20430
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