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The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375mm and 0.5mm (corresponding to 0.6 THz–0.8 THz) by evaluating the Fabry-Pérot oscillations within surfacestructured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.

The raw data supporting this study have been deposited in the “TUdatalib” database and are available at https://doi.org/10.48328/tudatalib-664.

All codes written for and used in this study are available from the corresponding authors upon request.