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In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films

Wardenga, Hans ; Frischbier, Mareike ; Morales-Masis, Monica ; Klein, Andreas (2021)
In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films.
In: Materials, (2)
doi: 10.26083/tuprints-00019791
Article, Secondary publication, Publisher's Version

Copyright Information: CC BY 4.0 International - Creative Commons, Attribution.

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Item Type: Article
Type of entry: Secondary publication
Title: In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films
Language: English
Date: 2021
Place of Publication: Darmstadt
Publisher: MDPI
Journal or Publication Title: Materials
Issue Number: 2
Series Volume: 8
DOI: 10.26083/tuprints-00019791
Corresponding Links:
Origin: Secondary publication service

Hydrogen doped In₂O₃ thin films were prepared by room temperature sputter deposition with the addition of H₂O to the sputter gas. By subsequent vacuum annealing, the films obtain high mobility up to 90 cm²/Vs. The films were analyzed in situ by X-ray photoelectron spectroscopy (XPS) and ex situ by X-ray diffraction (XRD), optical transmission and Hall effect measurements. Furthermore, we present results from in situ Hall effect measurements during vacuum annealing of In₂O₃:H films, revealing distinct dependence of carrier concentration and mobility with time at different annealing temperatures. We suggest hydrogen passivation of grain boundaries as the main reason for the high mobility obtained with In₂O₃:H films.

Status: Publisher's Version
URN: urn:nbn:de:tuda-tuprints-197917
Classification DDC: 600 Technology, medicine, applied sciences > 600 Technology
600 Technology, medicine, applied sciences > 620 Engineering and machine engineering
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 29 Oct 2021 12:18
Last Modified: 14 Aug 2023 09:46
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19791
PPN: 495587958
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