TU Darmstadt / ULB / TUprints

In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films

Wardenga, Hans ; Frischbier, Mareike ; Morales-Masis, Monica ; Klein, Andreas (2021):
In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films. (Publisher's Version)
8, In: Materials, (2), pp. 561-574. MDPI, e-ISSN 1996-1944,
DOI: 10.26083/tuprints-00019791,

Copyright Information: CC BY 4.0 International - Creative Commons, Attribution.

Download (1MB) | Preview
Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films
Language: English

Hydrogen doped In₂O₃ thin films were prepared by room temperature sputter deposition with the addition of H₂O to the sputter gas. By subsequent vacuum annealing, the films obtain high mobility up to 90 cm²/Vs. The films were analyzed in situ by X-ray photoelectron spectroscopy (XPS) and ex situ by X-ray diffraction (XRD), optical transmission and Hall effect measurements. Furthermore, we present results from in situ Hall effect measurements during vacuum annealing of In₂O₃:H films, revealing distinct dependence of carrier concentration and mobility with time at different annealing temperatures. We suggest hydrogen passivation of grain boundaries as the main reason for the high mobility obtained with In₂O₃:H films.

Journal or Publication Title: Materials
Series Volume: 8
Issue Number: 2
Publisher: MDPI
Classification DDC: 600 Technik, Medizin, angewandte Wissenschaften > 600 Technik
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 29 Oct 2021 12:18
Last Modified: 14 Jun 2022 12:17
DOI: 10.26083/tuprints-00019791
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-197917
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19791
Actions (login required)
View Item View Item