Wardenga, Hans ; Frischbier, Mareike ; Morales-Masis, Monica ; Klein, Andreas (2021)
In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films.
In: Materials, 2015, (2)
doi: 10.26083/tuprints-00019791
Article, Secondary publication, Publisher's Version
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| Item Type: | Article |
|---|---|
| Type of entry: | Secondary publication |
| Title: | In Situ Hall Effect Monitoring of Vacuum Annealing of In₂O₃:H Thin Films |
| Language: | English |
| Date: | 2021 |
| Place of Publication: | Darmstadt |
| Year of primary publication: | 2015 |
| Publisher: | MDPI |
| Journal or Publication Title: | Materials |
| Issue Number: | 2 |
| Series Volume: | 8 |
| DOI: | 10.26083/tuprints-00019791 |
| Corresponding Links: | |
| Origin: | Secondary publication service |
| Abstract: | Hydrogen doped In₂O₃ thin films were prepared by room temperature sputter deposition with the addition of H₂O to the sputter gas. By subsequent vacuum annealing, the films obtain high mobility up to 90 cm²/Vs. The films were analyzed in situ by X-ray photoelectron spectroscopy (XPS) and ex situ by X-ray diffraction (XRD), optical transmission and Hall effect measurements. Furthermore, we present results from in situ Hall effect measurements during vacuum annealing of In₂O₃:H films, revealing distinct dependence of carrier concentration and mobility with time at different annealing temperatures. We suggest hydrogen passivation of grain boundaries as the main reason for the high mobility obtained with In₂O₃:H films. |
| Status: | Publisher's Version |
| URN: | urn:nbn:de:tuda-tuprints-197917 |
| Classification DDC: | 600 Technology, medicine, applied sciences > 600 Technology 600 Technology, medicine, applied sciences > 620 Engineering and machine engineering |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Surface Science DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes |
| Date Deposited: | 29 Oct 2021 12:18 |
| Last Modified: | 14 Aug 2023 09:46 |
| URI: | https://tuprints.ulb.tu-darmstadt.de/id/eprint/19791 |
| PPN: | 495587958 |
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