Giere, A. ; Schafranek, Robert ; Zheng, Yuliang ; Maune, Holger ; Sazegar, Mohsen ; Jakoby, Rolf ; Klein, Anja (2008):
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components. (Publisher's Version)
In: Frequenz, 62 (3-4), pp. 52-56. De Gruyter, ISSN 0016-1136,
DOI: 10.25534/tuprints-00013399,
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[21916349 - Frequenz] Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components.pdf Copyright Information: In Copyright. Download (370kB) | Preview |
Item Type: | Article |
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Origin: | Secondary publication service |
Status: | Publisher's Version |
Title: | Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components |
Language: | English |
Abstract: | In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes. |
Journal or Publication Title: | Frequenz |
Volume of the journal: | 62 |
Issue Number: | 3-4 |
Place of Publication: | Darmstadt |
Publisher: | De Gruyter |
Classification DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 600 Technik 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften und Maschinenbau |
Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Surface Science 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Microwave Engineering |
Date Deposited: | 30 Nov 2020 13:55 |
Last Modified: | 07 Dec 2022 07:15 |
DOI: | 10.25534/tuprints-00013399 |
Corresponding Links: | |
URN: | urn:nbn:de:tuda-tuprints-133993 |
URI: | https://tuprints.ulb.tu-darmstadt.de/id/eprint/13399 |
PPN: | 50209009X |
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