• Publisher-DOI

Laser-driven light sources in the extreme ultraviolet range (EUV) enable nanoscopic imaging with unique label-free elemental contrast. However, to fully exploit the unique properties of these new sources, novel detection schemes need to be developed. Here, we show in a proof-of-concept experiment that superconducting nanowire single-photon detectors (SNSPD) can be utilized to enable photon counting of a laser-driven EUV source based on high harmonic generation (HHG). These detectors are dark-count free and accommodate very high count rates—a perfect match for high repetition rate HHG sources. In addition to the advantages of SNSPDs for classical imaging applications with laser-driven EUV sources, the ability to count single photons paves the way for very promising applications in quantum optics and quantum imaging with high energetic radiation like, e.g., quantum ghost imaging with nanoscale resolution.