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Reactive Dual Magnetron Sputtering: A Fast Method for Preparing Stoichiometric Microcrystalline ZnWO₄ Thin Films

Hermans, Yannick ; Mehmood, Faraz ; Lakus-Wollny, Kerstin ; Hofmann, Jan P. ; Mayer, Thomas ; Jaegermann, Wolfram (2021):
Reactive Dual Magnetron Sputtering: A Fast Method for Preparing Stoichiometric Microcrystalline ZnWO₄ Thin Films. (Publisher's Version)
In: Surfaces, 4 (2), pp. 106-114. MDPI, e-ISSN 2571-9637,
DOI: 10.26083/tuprints-00019374,
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Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: Reactive Dual Magnetron Sputtering: A Fast Method for Preparing Stoichiometric Microcrystalline ZnWO₄ Thin Films
Language: English
Abstract:

Thin films of ZnWO₄, a promising photocatalytic and scintillator material, were deposited for the first time using a reactive dual magnetron sputtering procedure. A ZnO target was operated using an RF signal, and a W target was operated using a DC signal. The power on the ZnO target was changed so that it would match the sputtering rate of the W target operated at 25 W. The effects of the process parameters were characterized using optical spectroscopy, X-ray diffraction, and scanning electron microscopy, including energy dispersive X-ray spectroscopy as well as X-ray photoelectron spectroscopy. It was found that stoichiometric microcrystalline ZnWO₄ thin films could be obtained, by operating the ZnO target during the sputtering procedure at a power of 55 W and by post-annealing the resulting thin films for at least 10 h at 600 °C. As FTO coated glass substrates were used, annealing led as well to the incorporation of Na, resulting in n+ doped ZnWO₄ thin films.

Journal or Publication Title: Surfaces
Journal volume: 4
Number: 2
Publisher: MDPI
Classification DDC: 500 Naturwissenschaften und Mathematik > 540 Chemie
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
Date Deposited: 26 Aug 2021 12:30
Last Modified: 26 Aug 2021 12:30
DOI: 10.26083/tuprints-00019374
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-193749
Additional Information:

Supplementary Material: https://www.mdpi.com/2571-9637/4/2/13/s1

URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19374
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