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Merbeler, Fabian ; Wismath, Sonja ; Haubold, Marco ; Bretthauer, Christian ; Kupnik, Mario (2022):
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates. (Publisher's Version)
In: Micromachines, 13 (5), MDPI, e-ISSN 2072-666X,
DOI: 10.26083/tuprints-00021291,
[Article]

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