Deformation Processes in Magnetron Sputtered Nanocrystalline Palladium and Palladium Gold Films

In the present thesis the mechanical properties of nanocrystalline palladium films and solid solution palladium gold films prepared by magnetron sputtering have been investigated in order to understand the underlying deformation processes. In comparison to coarse grained metals, where the deformation is carried almost exclusively by dislocation glide, in nanocrystalline metals many different deformation mechanisms have already been observed in different metals. One can conclude that it is not possible to extract one single deformation process working in nanocrystalline metals but there are various processes working simultaneously.

Das Ziel dieser Arbeit ist die Erforschung der Verformungsprozesse in nanokristallinen Metallen und Legierungen. Dazu wurden die mechanischen Eigenschaften von nanokristallinen Palladium- und Palladium-Gold-Filmen untersucht, welche mittels Magnetronsputtern hergestellt wurden.