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This paper presents a highly miniaturized tuneable microstrip line phase shifter for 5 GHz to 67 GHz. The design takes advantage of the microstrip topology by substituting the ground plane by a metallic-nanowire-filled porous alumina membrane (NaM). This leads to a slow-wave (SW) effect of the transmission line; thus, the transmission line can be physically compact while maintaining its electric length. By applying a liquid crystal (LC) with its anisotropic permittivity as substrate between the transmission line and the NaM, a tuneable microstrip line phase shifter is realized. Three demonstrators are identically fabricated filled with different types of high-performance microwave LCs from three generations (GT3-23001, GT5-26001 and GT7-29001). The measurement results show good matching in a 50 Ω system with reflection less than −10 dB over a wide frequency range. These demonstrators are able to reach a maximum figure of merit (FoM) of 41 °/dB, 48 °/dB, and 70 °/dB for different LCs (GT3-23001, GT5-26001 and GT7-29001, respectively). In addition, experiments show that all three LCs should be biased with square wave voltage at approximately 1 kHz to achieve maximum tuneability and response speed. The achieved response times with GT3-23001, GT5-26001 and GT7-29001 are 116 ms, 613 ms, and 125 ms, respectively, which are much faster than other reported LC phase shifter implementations. Large-signal analysis shows that these implementations have high linearity with third-order interception (IP3) points of approximately 60 dBm and a power handling capability of 25 dBm.

Index terms: IP3, liquid crystal, microstrip line, nanowires, phase shifter, slow-wave, S-parameter