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Reactive magnetron sputtering of Cu₂O: Dependence on oxygen pressure and interface formation with indium tin oxide

Deuermeier, Jonas ; Gassmann, Jürgen ; Brötz, Joachim ; Klein, Andreas (2021):
Reactive magnetron sputtering of Cu₂O: Dependence on oxygen pressure and interface formation with indium tin oxide. (Publisher's Version)
In: Journal of Applied Physics, 109 (11), AIP Publishing, ISSN 0021-8979, e-ISSN 1089-7550,
DOI: 10.26083/tuprints-00019938,
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Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: Reactive magnetron sputtering of Cu₂O: Dependence on oxygen pressure and interface formation with indium tin oxide
Language: English
Abstract:

Thin films of copper oxides were prepared by reactive magnetron sputtering and structural, morphological, chemical, and electronic properties were analyzed using x-ray diffraction, atomic force microscopy, in situ photoelectron spectroscopy, and electrical resistance measurements. The deposition conditions for preparation of Cu(I)-oxide (Cu₂O) are identified. In addition, the interface formation between Cu₂O and Sn-doped In2O3 (ITO) was studied by stepwise deposition of Cu₂O onto ITO and vice versa. A type II (staggered) band alignment with a valence band offset.

Journal or Publication Title: Journal of Applied Physics
Journal volume: 109
Number: 11
Publisher: AIP Publishing
Collation: 7 Seiten
Classification DDC: 500 Naturwissenschaften und Mathematik > 530 Physik
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science > Structure Research
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
Date Deposited: 17 Nov 2021 13:22
Last Modified: 17 Nov 2021 13:22
DOI: 10.26083/tuprints-00019938
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-199383
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19938
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