Enhancing electrical conductivity of room temperature deposited Sn-doped In₂O₃ thin films by hematite seed layers

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Item Type:	Article
Type of entry:	Secondary publication
Title:	Enhancing electrical conductivity of room temperature deposited Sn-doped In₂O₃ thin films by hematite seed layers
Language:	English
Date:	2021
Place of Publication:	Darmstadt
Publisher:	AIP Publishing
Journal or Publication Title:	Applied Physics Letters
Volume of the journal:	112
Issue Number:	15
Collation:	4 Seiten
DOI:	10.26083/tuprints-00019853
Corresponding Links:	Publisher-DOI
Origin:	Secondary publication service
Abstract:	Hematite Fe₂O₃ seed layers are shown to constitute a pathway to prepare highly conductive transparent tin-doped indium oxide thin films by room temperature magnetron sputtering. Conductivities of up to δ = 3300 S/cm are observed. The improved conductivity is not restricted to the interface but related to an enhanced crystallization of the films, which proceeds in the rhombohedral phase.
Status:	Publisher's Version
URN:	urn:nbn:de:tuda-tuprints-198538
Classification DDC:	500 Science and mathematics > 530 Physics
Divisions:	11 Department of Materials and Earth Sciences > Material Science > Surface Science 11 Department of Materials and Earth Sciences > Material Science > Structure Research
Date Deposited:	11 Nov 2021 13:17
Last Modified:	20 Jan 2023 10:54
URI:	https://tuprints.ulb.tu-darmstadt.de/id/eprint/19853
PPN:	503915718
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