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Enhancing electrical conductivity of room temperature deposited Sn-doped In₂O₃ thin films by hematite seed layers

Lohaus, Christian ; Steinert, Céline ; Deyu, Getnet ; Brötz, Joachim ; Jaegermann, Wolfram ; Klein, Andreas (2021):
Enhancing electrical conductivity of room temperature deposited Sn-doped In₂O₃ thin films by hematite seed layers. (Publisher's Version)
In: Applied Physics Letters, 112 (15), AIP Publishing, ISSN 0003-6951, e-ISSN 1077-3118,
DOI: 10.26083/tuprints-00019853,
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Item Type: Article
Origin: Secondary publication service
Status: Publisher's Version
Title: Enhancing electrical conductivity of room temperature deposited Sn-doped In₂O₃ thin films by hematite seed layers
Language: English
Abstract:

Hematite Fe₂O₃ seed layers are shown to constitute a pathway to prepare highly conductive transparent tin-doped indium oxide thin films by room temperature magnetron sputtering. Conductivities of up to δ = 3300 S/cm are observed. The improved conductivity is not restricted to the interface but related to an enhanced crystallization of the films, which proceeds in the rhombohedral phase.

Journal or Publication Title: Applied Physics Letters
Journal volume: 112
Number: 15
Publisher: AIP Publishing
Collation: 4 Seiten
Classification DDC: 500 Naturwissenschaften und Mathematik > 530 Physik
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science > Structure Research
Date Deposited: 11 Nov 2021 13:17
Last Modified: 11 Nov 2021 13:17
DOI: 10.26083/tuprints-00019853
Corresponding Links:
URN: urn:nbn:de:tuda-tuprints-198538
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/19853
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